PURPOSE: To form XYθ tables in a small load by providing a putting plate on a movable θ table of X, Y, θ tables through a vertical direction guide member, and by providing a load plate for supporting the putting plate along with the guide member on a weight receiving member provided on a base plate.

CONSTITUTION: A movable table 8 is put on X, Y tables 5, 3 through a fixing θtable 7, while an elevating base plate 9 is provided on the table 8, and a material putting plate 11 is put on the base plate 9 through a vertical direction guide member 12. A plurality of weight receiving members 20 are provided upright on a base plate 1, and a load plate 22 for supporting the material putting plate 11 is supported by the weight receiving member 20. The total weight applied to the load plate 22 is received by a cylinder 10 of the weight receiving member 20, while little load is applied to XYθ tables 5, 3, 7, 8, and the size of the table can thus be reduced.