Title:
YIELD PREDICTION SYSTEM
Document Type and Number:
Japanese Patent JP3208807
Kind Code:
B2
Abstract:
PURPOSE: To predict yield and acquisition quantity in the final inspection by collating an in-process inspection data with a final inspection data by executing the in-process inspection in the middle of a process, concerning the manufacture of thin-film products.
CONSTITUTION: This system is constituted of an in-process inspection device 2, final inspection device 3, data analysis station 1, in-process inspection database 5, final inspection database 7 and yield prediction database 6, and the in-process inspection of the products is executed in the middle of the process, according to the result, the yield prediction data in the yield prediction database 6 are retrieved, and the predictive yield in the final inspection is calculated. Since the final yield of the products can be predicted in the middle of the process, based on the predictive yield information, a production management section can adjust the production by additionally putting-in lacked components early and can deliver the ordered products before the date of the delivery, and the reduction of damage cost caused by the reduction of excess products can be expected.
Inventors:
Tsutomu Sakamoto
Seiji Ishikawa
Sadao Shimosha
Jun Nakazato
Hirokazu Yamamoto
Kazuhiko Matsuoka
Seiji Ishikawa
Sadao Shimosha
Jun Nakazato
Hirokazu Yamamoto
Kazuhiko Matsuoka
Application Number:
JP30021491A
Publication Date:
September 17, 2001
Filing Date:
November 15, 1991
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01L21/02; B65G61/00; G05B19/418; G06F19/00; G06Q10/04; G06Q50/00; G06Q50/04; (IPC1-7): G06F17/60; G06F19/00; H01L21/02
Domestic Patent References:
| JP4839172A | ||||
| JP344054A |
Attorney, Agent or Firm:
Yasuo Sakuta
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