Title:
皮膜のヤング率分布算出方法及び試料ホルダ
Document Type and Number:
Japanese Patent JP7104527
Kind Code:
B2
Abstract:
To provide a method for calculating a Young's modulus distribution of a film capable of calculating the Young's modulus distribution in a thickness direction of the film.SOLUTION: A method includes a first measurement step 1 in which the Young's modulus of a first sample having a first thickness film formed thereon is measured; a sample preparation step S3 for producing a second sample formed on the substrate having a different thickness from the first thickness and the second thickness of the film by adding a part of the film to the first sample or removing the part of the film in the thickness direction; and a the Young's modulus distribution calculating step 6 for calculating the Young's modulus distribution in the thickness direction of the film according to the second measurement step S1 for measuring Young's modulus of the first sample and a measurement result of at least the Young's modulus of the first sample and the second sample of which the Young's modulus of the second sample based on the measurement result of the Young's modulus of the first sample and the second sample.SELECTED DRAWING: Figure 1
Inventors:
Yoshifumi Okajima
Kazuma Takeno
Toroshie Taiji
Kazuma Takeno
Toroshie Taiji
Application Number:
JP2018037532A
Publication Date:
July 21, 2022
Filing Date:
March 02, 2018
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
G01N3/20
Domestic Patent References:
| JP2006193828A | ||||
| JP2010151584A | ||||
| JP9504877A |
Foreign References:
| CN103760043A | ||||
| KR100919827B1 | ||||
| US5847283 |
Attorney, Agent or Firm:
SSIP Patent Attorney Corporation