Title:
Z-AXIAL MICROMOTION MECHANISM FOR MICROSCOPE
Document Type and Number:
Japanese Patent JP3543935
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a Z-axial slight movement mechanism for microscope which has a 100 μm stroke or larger and 0.005 μm or smaller reproducibility of circularity.
SOLUTION: A piezoelectric element elastic fulcrum lever displacement expanding mechanism is formed below elastic fulcrum four-node parallel links 8 and 9 which connect a base block and a movable block 15, a lever output end and the movable block 15 are connected by an elastic fulcrum link, the reproducibility of the guide tracks of the elastic fulcrum 4-node parallel links is improved by absorbing the discrepancy of the displacement track of the lever output end, and elastic hinges 16 which cross each other at 90° between the base block and lever output end is provided to a piezoelectric element 20, abutting block abutting against the end surface of the displacement output end surface of the piezoelectric element 20 arranged between the base block and lever input end, thereby preventing a guide mechanism from galling due to the parallel discrepancy of a piezoelectric element output end surface.
Inventors:
Ominaga Kan
Satoshi Hirokawa
Satoshi Hirokawa
Application Number:
JP10832199A
Publication Date:
July 21, 2004
Filing Date:
April 15, 1999
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
G02B21/26; F16H21/10; G05D3/00; H01L41/08; H02N2/00; (IPC1-7): G02B21/26; G05D3/00; H01L41/08; H02N2/00
Domestic Patent References:
| JP10170833A | ||||
| JP2130514A | ||||
| JP2312148A | ||||
| JP9305234A | ||||
| JP9305234A | ||||
| JP7136888A | ||||
| JP628805A |
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