Z AXIS DRIVER

Japanese Patent JPS61250710

A

PURPOSE:To improve the convenience in use of a Z axis driver by using a diaphragm actuated by a fluid pressure as an actuator of the Z axis driver which is mounted with an object and moves it in parallel vertically or tilts it. CONSTITUTION:When an error voltage epsilon is positive, a valve 20 of a switch 10 is driven to the left in figure, a compressed air (prescribed pressure) from a compressed air source (not shown in figure) is fed to a diaphragm body 9 to approach a base 3 to a projecting system 5, a diatance l2 is decreased to reduce the error voltage epsilon. When the error voltage epsilon is zero, the valve 20 is positioned at the neutral position to shut an air supply/exhaust port 21 to the body 9 so as to keep the pressure in the body 9 constant. Further, when the error voltage is negative, the valve 20 of the switch 10 is driven to the right to exhaust the air in the body 9 through an exhaust port 22 of the switch 10, the distance l2 is increased to reduce the absolute value of the error voltage.

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MATSUSHITA KOICHI
ISOHATA JUNJI
YAMAMOTO SEKINORI
MIYAZAKI MAKOTO
OZAWA KUNITAKA
YOSHINARI HIDEKI

JP9089785A

November 07, 1986

April 30, 1985

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CANON KK

H01L21/30; G05D3/00; G05D3/12; H01L21/027; H01L21/67; H01L21/68; (IPC1-7): G05D3/00; H01L21/30; H01L21/68

Tatsuo Ito

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