Title:
酸化亜鉛膜の電析方法
Document Type and Number:
Japanese Patent JP4684477
Kind Code:
B2
Abstract:
The present process for electrodepositing a zinc oxide film comprises the steps of immersing a substrate and an opposing electrode in an electrodeposition bath which contains zinc nitrate and is kept heated, and forming the zinc oxide film on the substrate by passing a current between the substrate and the opposing electrode, wherein the process further includes a step of trapping the particles of zinc oxide precipitated in the electrodeposition bath by circulating or stirring the bath before the formation of the zinc oxide film, whereby the present process can prevent the generated zinc oxide powder from depositing on the surfaces of the substrate and the zinc oxide film formed by electrodeposition when restarting or starting the formation of a zinc oxide film by the electrodeposition using an electrodeposition apparatus, and hence the formation of a uniform zinc oxide film free from defects.
Inventors:
Kozo Arao
Yuichi Sonoda
Yusuke Miyamoto
Toyama
Yuichi Sonoda
Yusuke Miyamoto
Toyama
Application Number:
JP2001200808A
Publication Date:
May 18, 2011
Filing Date:
July 02, 2001
Export Citation:
Assignee:
Canon Inc
International Classes:
C25D21/06; C25D21/18; C25D9/08; C25D9/10; C25D13/16; C25D21/02; C25D21/10; H01G9/20; H01L31/0392; H01L31/04; H01L31/18
Domestic Patent References:
| JP2000178789A | ||||
| JP2000045095A |
Attorney, Agent or Firm:
Keisuke Watanabe
Yoshihiro Yamaguchi
Yoshihiro Yamaguchi