Title:
An acquisition method and a polish device of sliding vector distribution on the acquisition method of the sliding distance distribution on a dresser's polishing member, and a dresser's polishing member
Document Type and Number:
Japanese Patent JP6034717
Kind Code:
B2
Abstract:
The method includes: calculating an increment of a sliding distance of a dresser by multiplying a relative speed between the dresser and a polishing member by a contact time between them; correcting the increment of the sliding distance by multiplying the calculated increment of the sliding distance by at least one correction coefficient; calculating the sliding distance by repeatedly adding the corrected increment of the sliding distance to the sliding distance according to elapse of time; and producing the sliding-distance distribution of the dresser from the obtained sliding distance and a position of a sliding-distance calculation point. The at least one correction coefficient includes an unevenness correction coefficient provided for the sliding-distance calculation point. The unevenness correction coefficient is a correction coefficient that allows a profile of the polishing member to reflect a difference between an amount of scraped material of the polishing member in its raised portion and an amount of scraped material of the polishing member in its recess portion.
Inventors:
Takahiro Shimano
Mutsumi Tanikawa
Naonori Matsuo
Yamaguchi Tosho
Kazuhide Watanabe
Mutsumi Tanikawa
Naonori Matsuo
Yamaguchi Tosho
Kazuhide Watanabe
Application Number:
JP2013033660A
Publication Date:
November 30, 2016
Filing Date:
February 22, 2013
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B24B53/00; B24B37/00
Domestic Patent References:
| JP2010076049A | ||||
| JP9300207A | ||||
| JP2011530809A |
Attorney, Agent or Firm:
Isamu Watanabe
Tetsuya Hirosawa
Tetsuya Hirosawa
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