Title:
An acquisition method of seduced time
Document Type and Number:
Japanese Patent JP6057797
Kind Code:
B2
Abstract:
A settling time acquisition method includes writing at least one reference pattern formed by at least one shot of a charged particle beam, writing an evaluation pattern, which has been formed by combination of the first and second shots of a charged particle beam shaped to first and second patterns of different sizes and whose width size is the same as that of the reference pattern, while changing, concerning beam shaping of the second shot, a settling time of a DAC amplifier, wherein writing is performed for each settling time, measuring the width size of the reference pattern, measuring the width size of the evaluation pattern for each settling time, calculating, for each settling time, a difference between the width sizes of the reference and evaluation patterns, and acquiring a settling time from each settling time of the DAC amplifier when the difference is not exceeding a threshold value.
Inventors:
Nishimura Rieko
Michihiro Sakai
Michihiro Sakai
Application Number:
JP2013058125A
Publication Date:
January 11, 2017
Filing Date:
March 21, 2013
Export Citation:
Assignee:
New Flare Technology Co., Ltd.
International Classes:
H01L21/027; G03F7/20; H01J37/305
Domestic Patent References:
| JP2010073732A | ||||
| JP2009272366A | ||||
| JP2010245099A | ||||
| JP9186070A | ||||
| JP2010074039A | ||||
| JP2009088202A | ||||
| JP2014041952A | ||||
| JP2013058699A |
Attorney, Agent or Firm:
Tetsuma Ikegami
Akira Sudo
Mitsuyuki Matsuyama
Akira Sudo
Mitsuyuki Matsuyama
Previous Patent: A cooling method of a gas turbine combined plant and the hot parts in a gas turbine
Next Patent: SILENCER TYPE SPEAKER ACOUSTIC BOX
Next Patent: SILENCER TYPE SPEAKER ACOUSTIC BOX