Title:
An active vibration removal device, the vibration removal method, a processing device, an inspection device, an exposure device, and a manufacturing method of a work
Document Type and Number:
Japanese Patent JP6152001
Kind Code:
B2
Abstract:
An active anti-vibration apparatus is provided that supports a wide range of vibration accelerations using only one type of anti-vibration mechanism. Upon occurrence of an excessive acceleration, the active anti-vibration apparatus performs switching such that an acceleration detection gain 14b of an acceleration amplifier 14 is multiplied by a prescribed magnification, the cutoff frequency of a high-pass filter 11a of a vibration control unit 11 is increased, and an acceleration control gain 11b of the vibration control unit 11 is multiplied by the reciprocal of the prescribed magnification.
Inventors:
Ryuji Kimura
Susuke Soumura
Susuke Soumura
Application Number:
JP2013155914A
Publication Date:
June 21, 2017
Filing Date:
July 26, 2013
Export Citation:
Assignee:
Canon Inc
International Classes:
F16F15/02; F16F15/04; H01L21/027
Domestic Patent References:
| JP2012002307A | ||||
| JP2008261431A | ||||
| JP2002031187A | ||||
| JP2000170827A | ||||
| JP10169702A | ||||
| JP2001221278A |
Attorney, Agent or Firm:
Okabe
Shinichi Usui
Takao Ochi
Seiichiro Takahashi
Koji Yoshizawa
Masami Saito
Katsuhiko Kimura
Naofumi Tanaka
Shinichi Usui
Takao Ochi
Seiichiro Takahashi
Koji Yoshizawa
Masami Saito
Katsuhiko Kimura
Naofumi Tanaka
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