Title:
流体制御装置、流体制御装置の調整方法
Document Type and Number:
Japanese Patent JP5505559
Kind Code:
B2
Abstract:
A fluid control apparatus that allows the natural vibration frequency of a flexible plate to be adjusted to an optimum value and a method for adjusting the fluid control apparatus are provided. In a pressing step, a piezoelectric pump (101) is placed on a stage (502) with a cover plate (195) facing upward, the stage (502) is moved up, and a center portion of a principal surface of the cover plate (195) on a side opposite to a diaphragm (141) is pressed with a pressing pin (503). As a result, the cover plate (195) and the base plate (191) are shaped so as to warp convexly toward the diaphragm (141) side, and a portion joined to a flexible plate (151) is pulled, whereby the flexible plate (151) is caused to warp convexly toward the diaphragm (141) side. Thus, residual tensile stress occurs in a movable portion (154) of the flexible plate (151). Therefore, by the residual tensile stress, the tensile stress of the movable portion (154) of the flexible plate (151) is increased, and it is possible to adjust the natural vibration frequency of the movable portion (154) to an optimum value at which a desired pump pressure equal to or higher than a predetermined value is obtained with power consumption within an allowable range.
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Inventors:
Atsuhiko Hirata
Kenta Omori
Kenta Omori
Application Number:
JP2013509360A
Publication Date:
May 28, 2014
Filing Date:
October 10, 2012
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
F04B45/04; F04B43/04; F04B45/047
Domestic Patent References:
| JP2011027079A | 2011-02-10 | |||
| JP2007198147A | 2007-08-09 |
Foreign References:
| WO2009145064A1 | 2009-12-03 | |||
| WO2008069264A1 | 2008-06-12 |
Attorney, Agent or Firm:
Kaede International Patent Office