Title:
通気型ファラデーカップ及びガスクラスタイオンビーム処理システム
Document Type and Number:
Japanese Patent JP5650461
Kind Code:
B2
Abstract:
System and method of gas-cluster ion beam processing is realized by incorporating improved beam and workpiece neutralizing components. Larger GCIB current transport is enabled by low energy electron neutralization of space charge of the GCIB. The larger currents transport greater quantities of gas in the GCIB. A vented faraday cup beam measurement system maintains beam dosimetry accuracy despite the high gas transport load.
Inventors:
マック，ミカエル，イー．
Application Number:
JP2010184767A
Publication Date:
January 07, 2015
Filing Date:
August 20, 2010
Export Citation:
Assignee:
ティーイーエル エピオン インク．
International Classes:
H01J37/30; C23C16/452; H01J3/14; H01J27/00; H01J37/02; H01J37/08; H01J37/317
Attorney, Agent or Firm:
Patent business corporation Hiroe associates patent firm