Title:
An alignment apparatus, an exposure device, and an alignment method
Document Type and Number:
Japanese Patent JP6115543
Kind Code:
B2
Inventors:
Takeshi Nakatani
Shigehisa Sugiyama
Shigehisa Sugiyama
Application Number:
JP2014221029A
Publication Date:
April 19, 2017
Filing Date:
October 30, 2014
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
G03F9/00
Domestic Patent References:
| JP2006120790A | ||||
| JP8138999A | ||||
| JP2012084713A | ||||
| JP5166702A | ||||
| JP11340120A | ||||
| JP4373376B2 | ||||
| JP4493272B2 |
Foreign References:
| EP1615077A1 | ||||
| US20020167649 |
Attorney, Agent or Firm:
Megumi Konishi
Shigeyuki Nagaoka
Shigeyuki Nagaoka