Title:
ALIGNMENT STAGE AND PROCESSING DEVICE COMPRISING THE SAME
Document Type and Number:
Japanese Patent JP2017132007
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an alignment stage that can sufficiently correct a deviation of a work-piece without needing a rotation stopper and a processing device comprising the same.SOLUTION: An alignment stage 1 comprises: a first plate 2 having a first concave surface 2J formed partially in a cylindrical inner surface shape extending along a Y direction; a second plate 3 which has a first convex surface 3J, arranged on the first plate 2, which has a shape extending along the first concave surface 2J at the first plate 2 side and a second concave surface (3K) formed partially in a cylindrical inner surface shape extending along a X direction orthogonal to the Y direction at the opposite side of the first plate 2 side; and a third plate 4, arranged on the second plate 3, which has a second convex surface 4E having a shape extending along the second concave surface 3K at the second plate 3 side.SELECTED DRAWING: Figure 4
Inventors:
HIRAYAMA TAKUYA
Application Number:
JP2016014871A
Publication Date:
August 03, 2017
Filing Date:
January 28, 2016
Export Citation:
Assignee:
OILES INDUSTRY CO LTD
International Classes:
B23Q1/34; B24B39/02
Attorney, Agent or Firm:
Wilfort International Patent Office
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