Title:
The amount detecting device of displacement, and the amount detecting method of displacement
Document Type and Number:
Japanese Patent JP6232961
Kind Code:
B2
Inventors:
Hiroshi Okamoto
Fukuhiro Makigaki
Fukuhiro Makigaki
Application Number:
JP2013238589A
Publication Date:
November 22, 2017
Filing Date:
November 19, 2013
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01B21/00; G01M5/00; G01P21/00
Domestic Patent References:
| JP2014501917A | ||||
| JP2009222681A | ||||
| JP2003014711A | ||||
| JP2009229070A | ||||
| JP2001265425A |
Foreign References:
| US20100114503 |
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai
Keisuke Nishida
Satoshi Nakai
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