Title:
力学量センサ
Document Type and Number:
Japanese Patent JP5545281
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a dynamic quantity sensor structured such that a sensor area is not largely scaled while dynamic quantity is accurately detected.SOLUTION: This dynamic quantity sensor includes: a first substrate 21 (a silicon sensor substrate) having first dynamic quantity detection means (for example, a capacity type acceleration sensor 20); second dynamic quantity detection means (for example, a piezoelectric type pressure sensor 30); and a second substrate (a silicon sensor substrate) abutted to the first substrate. The second substrate is oppositely faced abutted to the first substrate so that a sealing space 37 can be formed, and the first dynamic quantity detection means is sealed in the sealing space so that the first dynamic quantity detection means can be protected.
Inventors:
Fujii Tetsuo
Kawasaki 栄嗣
Kawasaki 栄嗣
Application Number:
JP2011208288A
Publication Date:
July 09, 2014
Filing Date:
September 24, 2011
Export Citation:
Assignee:
Denso, Inc.
International Classes:
G01L9/00; G01P15/08; G01P15/125; H01L29/84
Attorney, Agent or Firm:
Kazuyuki Yahagi
Yasuhei Nonobe
Takanori Kubo
Yasuhei Nonobe
Takanori Kubo