Title:
ANALYZER AND ANALYSIS METHOD
Document Type and Number:
Japanese Patent JP2018040613
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To prevent an unnatural contrast to be generated in a calculated image when performing analysis using a three-dimensional Bloch wave method.SOLUTION: Provided is an analyzer 1 comprising: a two-dimensional Bloch wave method calculation unit 2 for calculating an electron diffraction image by a two-dimensional Bloch wave method; a three-dimensional Bloch wave method calculation unit 3 for calculating an electron diffraction image by a three-dimensional Bloch wave method; a calculated image collation unit for collating a calculated image that is calculated by the two-dimensional Bloch wave method calculation unit with a calculated image that is calculated by the three-dimensional Bloch wave method calculation unit; and a calculated image-experimental image collation unit 5 for collating a calculated image that is calculated by the three-dimensional Bloch wave method calculation unit with an experimental image that is an electron diffraction image acquired by a transmission electron microscope 7, using a Laue zone switching position determined on the basis of the result of collation by the calculated image collation unit, and obtaining an analysis result.SELECTED DRAWING: Figure 1
Inventors:
YAMAZAKI TAKASHI
Application Number:
JP2016173436A
Publication Date:
March 15, 2018
Filing Date:
September 06, 2016
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
G01N23/20058
Attorney, Agent or Firm:
Yu Sanada
Masahisa Yamamoto
Masahisa Yamamoto
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