Title:
An aperture and a mask exposure device using it
Document Type and Number:
Japanese Patent JP5990926
Kind Code:
B2
Inventors:
Ken Igawa
Shinji Kuniya
Shinji Kuniya
Application Number:
JP2012031688A
Publication Date:
September 14, 2016
Filing Date:
February 16, 2012
Export Citation:
Assignee:
Toppan Printing Co., Ltd.
International Classes:
G03F7/20; G02B3/00; G02B5/00
Domestic Patent References:
| JP5267124A | ||||
| JP2009139444A | ||||
| JP7234366A |
Foreign References:
| US5707501 | ||||
| US20090141330 | ||||
| US5459602 |
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