Title:
半導体プロセスチャンバ内において使用するための物品
Document Type and Number:
Japanese Patent JP5703262
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method and system for providing a texture to a surface of a workpiece, such as a chamber component.SOLUTION: The method includes providing a workpiece to a texturizing chamber and scanning a beam of electromagnetic energy across the surface of the workpiece to form a plurality of features thereon. The features formed are generally depressions, protuberances, and combinations thereof. A method of reducing contamination in a process chamber is also provided. The method includes scanning a beam of electromagnetic energy across a surface of one or more process chamber components to form a plurality of features thereon, positioning the one or more chamber components into a process chamber, and initiating a process sequence within the process chamber.
Inventors:
Alan Earl Popiolkowski
Shannon M Heart
Marc Auch Weitzer
Alan Bi Liu
Jennifer El Wattier
Brian west
Mark menzie
Shannon M Heart
Marc Auch Weitzer
Alan Bi Liu
Jennifer El Wattier
Brian west
Mark menzie
Application Number:
JP2012138357A
Publication Date:
April 15, 2015
Filing Date:
June 20, 2012
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
B24C11/00; H01L21/02; B23K15/00; C23F1/00; C23F4/00; H01L21/00; H01L21/205; H01L21/3065
Domestic Patent References:
| JP8277460A | ||||
| JP7148584A | ||||
| JP9066325A | ||||
| JP2000158157A | ||||
| JP2000044384A |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Makoto Hirano
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Makoto Hirano