Title:
AUXILIARY FILM
Document Type and Number:
Japanese Patent JP2023158635
Kind Code:
A
Abstract:
To provide a system for preventing a device from being polluted or damaged by sticking an auxiliary film including a body and a plurality of fine structures formed on a first surface of the body and a protective film for protecting a device surface.SOLUTION: In an auxiliary film 1 attached to a surface 4 protected in advance of a base plate 2, fine structures 14 include irregular appearance on a first surface 12 formed on a body 10 and have two end parts respectively extending to the periphery of the first surface. One end part of the plurality of fine structures extends to a first edge 122 of the first surface, and the other end part extends to a second edge of the first surface. When the auxiliary film is attached to a surface protected in advance of a base plate, the surfaces of the fine structures and the base plate increase separation efficiency of a body from the base plate, and also forms some open air passages to reduce an overall process time.SELECTED DRAWING: Figure 1
Inventors:
YANG SZU-NAN
WU CHEN-CHI
HSU HUNG-LIANG
LIN CHIH-YUAN
HSIAO CHIH-LUNG
HSU MING-YUEH
WU CHEN-CHI
HSU HUNG-LIANG
LIN CHIH-YUAN
HSIAO CHIH-LUNG
HSU MING-YUEH
Application Number:
JP2023045115A
Publication Date:
October 30, 2023
Filing Date:
March 22, 2023
Export Citation:
Assignee:
PROLOGIUM TECH CO LTD
International Classes:
H01L21/683; B65D85/86
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK