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Title:
【発明の名称】歪付けウエハのゲツタリング能力の評価方法
Document Type and Number:
Japanese Patent JP2508530
Kind Code:
B2
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Inventors:
MORITA ETSURO
Application Number:
JP10268187A
Publication Date:
June 19, 1996
Filing Date:
April 25, 1987
Export Citation:
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Assignee:
MITSUBISHI MATERIALS CORP
International Classes:
G01N22/02; H01L21/322; H01L21/66; (IPC1-7): H01L21/66; G01N22/02; H01L21/322
Domestic Patent References:
JP61290347A
JP57206044A
Attorney, Agent or Firm:
Masatake Shiga (1 person outside)



 
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