A barrier film forming device and an internal electrode - Mitsubishi Heavy Industries Machinery Systems Co., Ltd.

Title:

A barrier film forming device and an internal electrode

Document Type and Number:

Japanese Patent JP6226191

Kind Code:

B2

Inventors:

Kiyoshi Hirotani
Yasuhiro Okada
Atsushi Ueda
Naofumi Hara

Application Number:

JP2014037890A

Publication Date:

November 08, 2017

Filing Date:

February 28, 2014

Export Citation:

Assignee:

Mitsubishi Heavy Industries Machinery Systems Co., Ltd.

International Classes:

C23C16/44; B65D23/00; C23C16/507; C23C16/509

Domestic Patent References:

Attorney, Agent or Firm:

Ryuichiro Mori
Masatake Shiga
Tadashi Takahashi
Tetsuo Yamazaki
Yasushi Matsunuma

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