Title:
A barrier film forming device and an internal electrode
Document Type and Number:
Japanese Patent JP6226191
Kind Code:
B2
Inventors:
Kiyoshi Hirotani
Yasuhiro Okada
Atsushi Ueda
Naofumi Hara
Yasuhiro Okada
Atsushi Ueda
Naofumi Hara
Application Number:
JP2014037890A
Publication Date:
November 08, 2017
Filing Date:
February 28, 2014
Export Citation:
Assignee:
Mitsubishi Heavy Industries Machinery Systems Co., Ltd.
International Classes:
C23C16/44; B65D23/00; C23C16/507; C23C16/509
Domestic Patent References:
JP2008231468A | ||||
JP2009194125A | ||||
JP7180710A | ||||
JP2003237754A |
Attorney, Agent or Firm:
Ryuichiro Mori
Masatake Shiga
Tadashi Takahashi
Tetsuo Yamazaki
Yasushi Matsunuma
Masatake Shiga
Tadashi Takahashi
Tetsuo Yamazaki
Yasushi Matsunuma
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