Title:
A basin system dispersing element for chemical machinery polish, and a chemical machinery grinding method using it
Document Type and Number:
Japanese Patent JP5927806
Kind Code:
B2
Inventors:
Keiichi Sato
Kubota Kiyonobu
Masahiro Noda
Tomohisa Konno
Kubota Kiyonobu
Masahiro Noda
Tomohisa Konno
Application Number:
JP2011177933A
Publication Date:
June 01, 2016
Filing Date:
August 16, 2011
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
H01L21/304; B24B37/00; C09K3/14
Domestic Patent References:
| JP2008124377A | ||||
| JP201028079A | ||||
| JP201028082A | ||||
| JP2010269985A |
Foreign References:
| WO2011093153A1 |