Title:
【発明の名称】膜連結による双安定マイクロアクチュエータ
Document Type and Number:
Japanese Patent JP2001502247
Kind Code:
A
Abstract:
A bistable electrostatic actuator with pneumatic or liquid coupling. The actuator has enclosed metallic electrodes. It can be used for a microvalve or micropump. The actuator has buckled membrane sections in pairs and curved substrate electrodes, locally associated with said membrane sections.
Inventors:
Quentzer, Hans, Joachim
Wagner, Bernd
Wagner, Bernd
Application Number:
JP52816497A
Publication Date:
February 20, 2001
Filing Date:
February 10, 1997
Export Citation:
Assignee:
Fraunhofer-Gesellschafts, tools, Felderung, Da, Angewanten, Forschung, Eingetlergenel, Fehlein
International Classes:
B81C1/00; F04B43/04; F15C3/04; F15C5/00; F16K99/00; H01H59/00; H01L41/22; B81B3/00; H01L41/312; H02N1/00; (IPC1-7): B81B3/00; B81C1/00; F04B43/04; F15C3/04; H01H59/00; H01L41/22; H02N1/00
Attorney, Agent or Firm:
Tajiro Taiji (1 person outside)