Title:
基板外観検査装置用の基板反転機構および該基板反転機構を備えた基板反転搬送手段
Document Type and Number:
Japanese Patent JP5415325
Kind Code:
B2
Inventors:
Atsushi Kamihira
Application Number:
JP2010041403A
Publication Date:
February 12, 2014
Filing Date:
February 26, 2010
Export Citation:
Assignee:
Hioki Electric Co., Ltd.
International Classes:
G01N21/956; G01N21/84
Domestic Patent References:
| JP2007256017A | ||||
| JP200097671A | ||||
| JP200039307A | ||||
| JP6129993A |
Attorney, Agent or Firm:
Hiroaki Kumagai