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Title:
BOAT FOR CVD DEVICE, AND CVD DEVICE
Document Type and Number:
Japanese Patent JP2016222987
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technology capable of suppressing sticking of a wafer onto a boat for a CVD device at a low cost.SOLUTION: A boat 1 for a CVD device is a boat for a CVD device capable of placing hierarchically a plurality of wafers 10. The boat 1 for the CVD device includes a plurality of support rods 3, and a plurality of claws 4 arranged at each interval determined beforehand in the vertical direction of the plurality of support rods 3, and supporting the wafers 10. A notch 5 is formed on an upper surface of the plurality of claws 4.SELECTED DRAWING: Figure 3

Inventors:
HASHIMOTO KOTA
Application Number:
JP2015111829A
Publication Date:
December 28, 2016
Filing Date:
June 02, 2015
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
C23C16/458; H01L21/205; H01L21/683
Domestic Patent References:
JP2000208601A2000-07-28
JPH07125804A1995-05-16
JPH04105544U1992-09-10
JPH07125804A1995-05-16
JP2012134387A2012-07-12
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita



 
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