Title:
キャパシタンス温度センサ及び温度測定装置
Document Type and Number:
Japanese Patent JP4528943
Kind Code:
B2
Abstract:
A capacitance temperature sensor in which temperature is measured by detecting capacitance of a parallel plate condenser which comprises a dielectric material comprising strontium titanate single crystal in which (a) 30% by weight or less of oxygen-16 or (b) 30% by weight to 50% by weight of oxygen-16 is substituted with oxygen-18 isotope.
Inventors:
Hiroshi Takashima
Tokaibayashi Akira
Ruihei Wang
Naoki Shirakawa
Mitsuru Ito
Tokaibayashi Akira
Ruihei Wang
Naoki Shirakawa
Mitsuru Ito
Application Number:
JP2004132133A
Publication Date:
August 25, 2010
Filing Date:
April 27, 2004
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
G01K7/34; G01K7/00; H01G7/04
Domestic Patent References:
| JP2003209266A | ||||
| JP2002090228A | ||||
| JP55159506A | ||||
| JP2290520A |