Title:
A capacitance type physical quantity sensor and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6020341
Kind Code:
B2
Inventors:
Yoshioka Tetsuwo
Application Number:
JP2013099583A
Publication Date:
November 02, 2016
Filing Date:
May 09, 2013
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01P15/125; B81B3/00; B81C3/00; G01P15/08; H01L29/84
Domestic Patent References:
| JP2012117972A | ||||
| JP201117693A | ||||
| JP2010127763A | ||||
| JP200141973A | ||||
| JP2000205862A | ||||
| JP10189500A |
Attorney, Agent or Firm:
Patent Business Corporation Yuai Patent Office