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Title:
コンデンサの容量調節方法及びトリマーコンデンサ
Document Type and Number:
Japanese Patent JP4121362
Kind Code:
B2
Abstract:

To provide a method for conditioning capacity which has no use for providing a protective film after conditioning the capacity, and to provide a trimmer capacitor suitable for it.

Related to the method for conditioning the capacity of a capacitor constituted by forming a lower electrode, a dielectric film and an upper electrode over an insulating substrate in this order, the dielectric film comprises an oxide, and a protective film consisting of a material transmitting a laser is further formed on the upper electrode, and the laser is irradiated from upper side of the protective film toward the upper electrode, to partially oxidize the upper electrode. As a material transmitting the laser, for example, when the laser is a YAG laser, a silicon oxide and a polyimide, etc. are quoted.

COPYRIGHT: (C)2004,JPO&NCIPI


Inventors:
Nakamura
Makoto Kozaki
Application Number:
JP2002354825A
Publication Date:
July 23, 2008
Filing Date:
December 06, 2002
Export Citation:
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Assignee:
Susumu Industry Co., Ltd.
International Classes:
H01G4/255; H01G7/00
Domestic Patent References:
JP2002314218A
JP8316085A
JP10326722A
JP200215948A
JP5645012A
Attorney, Agent or Firm:
Masayuki Yano



 
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