Title:
【発明の名称】薄膜形成方法
Document Type and Number:
Japanese Patent JP2590534
Kind Code:
B2
More Like This:
Inventors:
KAMACHI HIDEKI
ARAKI MAKOTO
ARAKI MAKOTO
Application Number:
JP15622088A
Publication Date:
March 12, 1997
Filing Date:
June 23, 1988
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
C23C16/50; (IPC1-7): C23C16/50
Domestic Patent References:
| JP6431976A | ||||
| JP6418990A | ||||
| JP6247483A | ||||
| JP62174382A | ||||
| JP62238371A |
Attorney, Agent or Firm:
Teiichi