Title:
DIAMOND COATED MEMBER
Document Type and Number:
Japanese Patent JP3214891
Kind Code:
B2
Abstract:
PURPOSE: To improve adhesion property between a substrate and a diamond coating film, and to obtain durability and a longer life of the coated member by forming a diamond film on a porous layer comprising a specified material formed on the surface of a substrate.
CONSTITUTION: The porous layer is formed on the surface of a substrate by coating the substrate with carbides, nitrides or carbide/nitrides of two or more metals selected from the groups IVA, VA and VIA in the periodical table and heating. Then, a diamond thin film is formed on the surface of the heat-treated porous layer of the substrate. Or, when the amt. of titanium or tantalum in the porous layer is small, the substrate is subjected to plasma treatment under specified conditions as the pretreatment, and then a diamond coating is formed thereon. The diamond thin film is formed by gas phase synthesizing method using carbon source gas. Thereby, the carbon source gas and metals in the intermediate layer react to produce carbides of metals and to produce diamond. Thus, adhesion property of the coating is improved.
Inventors:
Toshio Isozaki
Atsuhiko Masuda
Atsuhiko Masuda
Application Number:
JP12392192A
Publication Date:
October 02, 2001
Filing Date:
May 15, 1992
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
B23B27/14; B23P15/28; C23C16/26; C23C16/27; C23C30/00; C30B29/04; (IPC1-7): C23C16/27; B23B27/14; B23P15/28; C23C30/00; C30B29/04
Domestic Patent References:
| JP4129622A | ||||
| JP656585A |
Attorney, Agent or Firm:
Naoki Fukumura