Title:
反射屈折光学系および該光学系を備えた露光装置
Document Type and Number:
Japanese Patent JP4780364
Kind Code:
B2
Abstract:
A catadioptric system comprising a first image forming optical system (G1) having a concave reflection mirror (CM2) and a plane reflection mirror (M1) and used to form the first intermediate image of a first plane (R) based on light from the first plane, a second image forming optical system (G2) having a concave reflection mirror (CM3) and a plane reflection mirror (M4) and used to form the second intermediate image of the first plane based on light via the first image forming optical system, and a third refractive type image forming optical system (G3) for forming the final image of the first plane on a second plane (W) based on light via the second image forming optical system.
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Inventors:
Takahashi Tomoto
Application Number:
JP2001179579A
Publication Date:
September 28, 2011
Filing Date:
June 14, 2001
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B17/08; G02B13/14; G02B13/18; G03F7/20; H01L21/027
Domestic Patent References:
| JP862502A | ||||
| JP821955A | ||||
| JP772393A | ||||
| JP713070A | ||||
| JP6242379A |
Attorney, Agent or Firm:
Takao Yamaguchi