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Title:
The catadioptric system which has a multiple reflection element for picturizing by a Taikai talkative
Document Type and Number:
Japanese Patent JP6255268
Kind Code:
B2
Abstract:
A catadioptric system includes a first catadioptric group, a second catadioptric group, and a lens group disposed in axial alignment with each other. The first catadioptric group includes a solid lens having an input surface, a primary reflective surface, secondary reflective surface and an exit surface. The primary reflective surface is a curved surface concave towards the secondary reflective surface. A light flux entering through the input surface undergoes more than two reflections between the primary and secondary reflective surfaces, prior to exiting through the exit surface. At least one of the primary reflective surface and secondary reflective surface has a continuous and smooth topological profile.

Inventors:
Masatsugu Nakano
Jose Manuel Sassian Alvarado
Tamer tea ellazaly
Application Number:
JP2014023770A
Publication Date:
December 27, 2017
Filing Date:
February 10, 2014
Export Citation:
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Assignee:
Canon Inc
International Classes:
G02B17/08; G02B21/02; H01L21/027
Domestic Patent References:
JP2007514179A
JP2007532937A
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu