Title:
遠心分離機
Document Type and Number:
Japanese Patent JP5854216
Kind Code:
B2
Abstract:
A centrifuge includes a vacuum pump machine configured of an auxiliary vacuum pump and an oil diffusion pump for exhausting gas inside a rotary chamber to outside, in which a rotor rotates at high speed. In the centrifuge, a thermistor for detecting a temperature of oil and an oil surface inside a boiler of the oil diffusion pump is provided inside the boiler, and power of a heater is adjusted with the temperature detected by the thermistor, so that a degree of vacuum inside the rotary chamber is stably reduced from atmospheric pressure to a high vacuum state. Besides, when the heater does not heat, a current is carried through the thermistor for self-heating, and it is determined from variation in a resistance value whether the oil exists or not at a position at which the thermistor 8 is placed.
Inventors:
Shinichi Haruki
Hiroyuki Takahashi
Hiroyuki Takahashi
Application Number:
JP2012008348A
Publication Date:
February 09, 2016
Filing Date:
January 18, 2012
Export Citation:
Assignee:
Hitachi Koki Co., Ltd.
International Classes:
B04B15/08; B04B13/00; F04B37/16; F04C25/02
Domestic Patent References:
| JP2011230085A | ||||
| JP2011025176A | ||||
| JP2010149047A | ||||
| JP2010131560A | ||||
| JP2001104826A | ||||
| JP2010104944A | ||||
| JP5054802A | ||||
| JP2011255250A |
Attorney, Agent or Firm:
Takashi Murai
Hiromi Murai
Hiromi Murai