Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
シャフト付きセラミックヒータ
Document Type and Number:
Japanese Patent JP7174159
Kind Code:
B2
Abstract:
A ceramic heater with a shaft includes: a ceramic plate in which resistance heating elements are embedded; a hollow ceramic shaft bonded to a surface on an opposite side of a wafer placement surface of the ceramic plate; multiple vertical grooves provided in an internal circumferential surface of the ceramic shaft in an axial direction; conductive films provided in the multiple vertical grooves, respectively; and connection members that each electrically connect a terminal of the resistance heating elements to a corresponding one of the conductive films.

More Like This:
JP4846776Component mounting device
WO/2009/113317SUBSTRATE HOLDER, SUBSTRATE HOLDER UNIT, SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE BONDING APPARATUS
JP4332409Substrate holding mechanism and exposure equipment and device manufacturing method using it
Inventors:
Tatsuya Kuno
Hiroshi Takebayashi
Kenichiro Aikawa
Application Number:
JP2021532730A
Publication Date:
November 17, 2022
Filing Date:
June 10, 2020
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
H01L21/683; H01L21/205; H01L21/301; H01L21/3065; H01L21/31; H05B3/02; H05B3/74
Domestic Patent References:
JP2017162878A
JP2006517740A
JP2007173828A
JP2016536803A
Attorney, Agent or Firm:
Patent Attorney Corporation ITEC International Patent Office



 
Previous Patent: Elevator door open protection device test method and elevator door open protection device

Next Patent: CCD photodetector and accompanying method of operation