Title:
CERAMIC HEATER
Document Type and Number:
Japanese Patent JP2023170989
Kind Code:
A
Abstract:
To provide a ceramic heater that contributes to improving the temperature uniformity of a wafer to be heated.SOLUTION: A ceramic heater 100 includes a ceramic base material 110, and a heater portions of an inner heater electrode 120 and an outer heater electrode 122 embedded in the ceramic base material 110. In a thermocouple 171 in which temperature measuring contacts 171a are arranged at positions A and C, the temperature measuring contacts 171a do not overlap the heater portions of the inner heater electrode 120 and the outer heater electrode 122 in the vertical direction.SELECTED DRAWING: Figure 2
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Inventors:
TAKAHASHI KAZUYA
Application Number:
JP2022083130A
Publication Date:
December 01, 2023
Filing Date:
May 20, 2022
Export Citation:
Assignee:
NGK SPARK PLUG CO
International Classes:
H05B3/74
Attorney, Agent or Firm:
Kijuro Kawakita
Masahiro Fujita
Masahiro Fujita