CERAMIC MATERIAL, PRODUCTION METHOD THEREOF, AND MEMBER FOR SEMICONDUCTOR PRODUCTION APPARATUS

Title:

CERAMIC MATERIAL, PRODUCTION METHOD THEREOF, AND MEMBER FOR SEMICONDUCTOR PRODUCTION APPARATUS

Document Type and Number:

Japanese Patent JP2017031439

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a ceramic material having high corrosion resistance to Cl-based plasma in comparison with hitherto.SOLUTION: A ceramic material contains a crystal phase of a complex oxide comprising a group 2 element M and a rare earth element Re, in which the group 2 element M is Sr, Ca or Ba, and in XRD chart, a first novel peak is observed between a peak on (040) plane of MReOand a peak on (320) plane. Such a ceramic material can be produced by preparing MReOas a raw material for flame spray, and by thermally spraying the raw material for flame spray to a predetermined object.SELECTED DRAWING: None

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Inventors:

SATO YOSUKE
INOUE KATSUHIRO
KATSUTA YUJI

Application Number:

JP2015149314A

Publication Date:

February 09, 2017

Filing Date:

July 29, 2015

Export Citation:

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Assignee:

NGK INSULATORS LTD

International Classes:

C23C4/10; H01L21/3065

Domestic Patent References:

JP2005154885A	2005-06-16
JP2012512330A	2012-05-31
JP2005248207A	2005-09-15
JP2004190136A	2004-07-08

Attorney, Agent or Firm:

Aitec International Patent Office

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