Title:
面取り加工装置
Document Type and Number:
Japanese Patent JP7317441
Kind Code:
B2
Abstract:
To provide a chamfering device that can prevent a work-piece from being damaged and polluted by dust and the like generated during truing.SOLUTION: A chamfering device 2, which chamfers an outer periphery part of a disk-like work-piece 11 having a first surface and a second surface at the opposite side of the first surface, comprises: a table 40 that has a holding surface smaller in diameter than the work-piece and rotates the holding surface; a processing unit 24 which includes a cylindrical chamfering grindstone 32 having at a side surface a recessed part that contacts the outer periphery part of the work-piece, a cylindrical polishing pad 36 having a side surface that contacts the outer periphery part of the work-piece and a first spindle 28 to which a chamfering grindstone and the polishing pad are attached; a truer 44 including a cylindrical forming grindstone 50 having at a side surface a protruding part shaped to correspond to the recessed part of the chamfering grindstone, and a second spindle 46 to which the forming grindstone is attached, and arranged at the opposite side of the table with respect to the processing unit; and a movement mechanism 4 which relatively moves the table, the processing unit and the truer.SELECTED DRAWING: Figure 4
Inventors:
Mai Ogasawara
Takashi Ono
Akihito Kawai
Takashi Ono
Akihito Kawai
Application Number:
JP2019077154A
Publication Date:
July 31, 2023
Filing Date:
April 15, 2019
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B9/00; B24B41/06; B24B53/00; H01L21/304
Domestic Patent References:
| JP2001308039A | ||||
| JP2002518195A | ||||
| JP2007088143A | ||||
| JP11347901A | ||||
| JP2012080044A |
Foreign References:
| US20010034194 | ||||
| US20070066192 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano