A charged particle beam device provided with monochrome meter and this - KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Title:

A charged particle beam device provided with monochrome meter and this

Document Type and Number:

Japanese Patent JP5913682

Kind Code:

B2

Abstract:

Disclosed herein are a monochromator and a charged particle beam apparatus including the same. The monochromator may include a first electrostatic lens configured to have a charged particle beam discharged by an emitter incident on the first electrostatic lens, refract a ray of the charged particle beam, and include a plurality of electrodes and a second electrostatic lens spaced apart from the first electrostatic lens at a specific interval and configured to have a central axis disposed identically with a central axis of the first electrostatic lens, have the charged particle beam output by the first electrostatic lens incident on the second electrostatic lens, refract the ray of the charged particle beam, and comprise a plurality of electrodes. Accordingly, there is an advantage in that a charged particle beam can have an excellent profile even after passing through the monochromator.

Inventors:

Takashi Ogawa
Zhao Fukurai
Ansho
For Tora
Korea

Application Number:

JP2015087380A

Publication Date:

April 27, 2016

Filing Date:

April 22, 2015

Export Citation:

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