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Title:
荷電粒子線装置及び試料観察方法
Document Type and Number:
Japanese Patent JP6403142
Kind Code:
B2
Abstract:
A charged particle beam device wherein a transmission image corresponding to an arbitrary diffraction spot or a diffraction pattern corresponding to a partial range in the transmission image are easily and automatically captured. A charged particle beam device having: an image-capturing unit for forming an image of a sample; a diaphragm disposed in the image-capturing unit, a plurality of openings having different sizes for transmitting an electron beam from the sample being formed in the diaphragm; a movement unit for varying the position of the diaphragm; and a display unit for displaying the formed image, wherein when the operator selects, e.g., a diffraction spot (A) on the display unit, the movement unit moves the diaphragm from the positional relationship between the diaphragm and the image in accordance with the position of the diffraction spot (A).

Inventors:
Hanawa Akasei
Hideki Kikuchi
Yoshifumi Taniguchi
Norie Yaguchi
Takashi Dobashi
Keitaro Watanabe
Takakazu Tamaki
Application Number:
JP2017512485A
Publication Date:
October 10, 2018
Filing Date:
April 14, 2015
Export Citation:
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Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/26; H01J37/09; H01J37/22
Domestic Patent References:
JP4366539A
JP2007122998A
JP2009110788A
JP201396900A
Attorney, Agent or Firm:
Hiraki International Patent Office