Title:
クリーニングユニットを有する荷電粒子ビームデバイスおよびその稼動方法
Document Type and Number:
Japanese Patent JP4146875
Kind Code:
B2
Abstract:
The invention provides a charged particle beam device, an emitter module for emitting charged particle beams and a method of operation thereof. Thereby, a charged particle beam emitter (15) emitting charged particles along an optical axis (1) is realized. On the same carrier body (32), a cleaning emitter (16) for emitting charged particles approximately along the optical axis (1) is realized. Thus, an improved cleaning can be provided.
Inventors:
Yashinski, Thomas
Application Number:
JP2006500044A
Publication Date:
September 10, 2008
Filing Date:
March 03, 2004
Export Citation:
Assignee:
Icy, Integrated Circuit Testing Gezel Shaft Fuhr Herb Lighter Pruff Technic Mitt Beschlenktel Haftung
International Classes:
H01J3/02; H01J37/073; H01J37/06; H01J37/065; H01J37/30
Domestic Patent References:
| JP47024756A | ||||
| JP6243776A | ||||
| JP11224629A | ||||
| JP10269977A |
Attorney, Agent or Firm:
Kenho Ikeda
Shuichi Fukuda
Shuichi Fukuda