Title:
A charged particle beam drawing apparatus and the irradiation time distribution method of the charged particle beam for multiplex drawing
Document Type and Number:
Japanese Patent JP6027798
Kind Code:
B2
Abstract:
A beam writing apparatus includes a unit to obtain a specific value by calculating an integer by dividing a total irradiation time by a multiplied value of a region number and a repeating times number, and by multiplying the integer by the repeating times number, to add the repeating times number to the specific value when a region is in the multiple writing unit regions and is not a specific region and when a region number of the multiple writing unit region, defined excluding the specific region, is below or equal to a value obtained by dividing the total irradiation time by the multiplied value of the region number and the repeating times number, to obtain a first remainder, and dividing the first remainder by the repeating times number, and to treat an added value of the repeating times number and the specific value, as a total irradiation time.
Inventors:
Jun Yashima
Akito Security
Yasuo Kato
Akito Security
Yasuo Kato
Application Number:
JP2012154457A
Publication Date:
November 16, 2016
Filing Date:
July 10, 2012
Export Citation:
Assignee:
New Flare Technology Co., Ltd.
International Classes:
H01L21/027; G03F7/20; H01J37/305
Domestic Patent References:
| JP2012084659A | ||||
| JP10261557A | ||||
| JP2003021910A | ||||
| JP59181018A |
Foreign References:
| US20120085940 |
Attorney, Agent or Firm:
Tetsuma Ikegami
Akira Sudo
Mitsuyuki Matsuyama
Akira Sudo
Mitsuyuki Matsuyama