クリーンルーム施設及びそのゾーンニング方法

Title:

クリーンルーム施設及びそのゾーンニング方法

Document Type and Number:

Japanese Patent JP5498863

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To decrease a floor height of a clean room facility, to perform local air conditioning, to reduce a load on an air conditioning system, to prevent the dispersion of contaminants, and to improve the rigidity of a floor structure without spoiling the degree of a design freedom such as a manufacturing facility layout.SOLUTION: A plurality of zoning units (2) are arranged with spaces on a floor surface in a large open space, and a plurality of machining/processing regions (10) for housing a manufacturing facility (M) are zoned. The zoning unit includes a ceiling structure (6) having a space below a ceiling surface (8) in the large open space, a wall structure (5) for supporting the ceiling structure, and an air conditioner (90) for air-conditioning the space in the zoning unit. The air conditioner controls an environment in the zoning unit to be an environment different from an entire space (1') outside the zoning unit.

Inventors:

Takeshi Ishiguro
Kiyotaka Iwamoto
Toyohiro Matsuo

Application Number:

JP2010129482A

Publication Date:

May 21, 2014

Filing Date:

June 05, 2010

Export Citation:

Click for automatic bibliography generation Help