Title:
【発明の名称】電界効果トランジスタの製造方法
Document Type and Number:
Japanese Patent JP3014609
Kind Code:
B2
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Inventors:
Mitsuru Nishitsuji
Application Number:
JP3522795A
Publication Date:
February 28, 2000
Filing Date:
February 23, 1995
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H01L21/302; H01L21/3065; H01L21/338; H01L29/812; (IPC1-7): H01L21/338; H01L21/3065; H01L29/812
Domestic Patent References:
| JP6215863A | ||||
| JP60107867A | ||||
| JP1198079A |
Attorney, Agent or Firm:
Hiroshi Maeda (2 outside)