Title:
コーティング組成物、反射防止膜、フォトレジストおよびそれを用いたパターン形成方法
Document Type and Number:
Japanese Patent JPWO2004067655
Kind Code:
A
Inventors:
Takashige Maekawa
Toyomichi Shimada
音澤 Nobuyuki
Naoko Sumi
Toyomichi Shimada
音澤 Nobuyuki
Naoko Sumi
Application Number:
JP2004000739W
Publication Date:
August 12, 2004
Filing Date:
January 28, 2004
Export Citation:
Assignee:
Asahi Glass Co., Ltd.
International Classes:
C09D7/12; G03F7/11; C09D127/12; H01L21/027; C09D5/02; C09D129/10; C08F16/24; C08F8/12