Title:
ARRANGEMENT METHOD AND ARRANGEMENT DEVICE, AND DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2017138467
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To effectively arrange a second article in a desired area on a first article.SOLUTION: There is provided a device manufacturing method including arranging a second article (CNT) in a desired area (201) on a first article (200), supplying a medium (LQ) containing the second article onto the first article and irradiating at least a part of the desired area on the supplied medium and the first article with first light (EL3).SELECTED DRAWING: Figure 6
Inventors:
NAKAZUMI MAKOTO
YAMADA KENTARO
ODATE AKIRA
KUNIGOME YUJI
NISHINO MINEYUKI
ARAI MASAYOSHI
NOBORI MICHIO
YAMADA KENTARO
ODATE AKIRA
KUNIGOME YUJI
NISHINO MINEYUKI
ARAI MASAYOSHI
NOBORI MICHIO
Application Number:
JP2016019010A
Publication Date:
August 10, 2017
Filing Date:
February 03, 2016
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F7/20; B82Y30/00; G02B19/00
Domestic Patent References:
| JP2013515370A | 2013-05-02 | |||
| JP2004356530A | 2004-12-16 | |||
| JP2003017508A | 2003-01-17 | |||
| JP2007537885A | 2007-12-27 | |||
| JP2014160041A | 2014-09-04 | |||
| JP2015517663A | 2015-06-22 | |||
| JP2010145950A | 2010-07-01 |
Attorney, Agent or Firm:
Tatsuo Egami