Title:
A constituent for polish, a grinding method using it, and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6282708
Kind Code:
B2
Inventors:
Norihiro Mizuno
Shugo Yokota
Yasuyuki Yamato
Akatsuka Asahiko
Shugo Yokota
Yasuyuki Yamato
Akatsuka Asahiko
Application Number:
JP2016199201A
Publication Date:
February 21, 2018
Filing Date:
October 07, 2016
Export Citation:
Assignee:
Fujimi Incorporated Co., Ltd.
International Classes:
C09K3/14; B24B37/00; H01L21/304
Domestic Patent References:
| JP2006524918A | ||||
| JP2010056127A | ||||
| JP2006049912A | ||||
| JP2009526659A | ||||
| JP2007234784A | ||||
| JP2010041037A | ||||
| JP2009289886A | ||||
| JP2007335847A |
Foreign References:
| US20100181525 | ||||
| WO2009008431A1 | ||||
| US20090202816 |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Hironobu Onda