Title:
A constituent for polish, and its use
Document Type and Number:
Japanese Patent JP6155017
Kind Code:
B2
Inventors:
Kosuke Tsuchiya
Tansho Hisanori
Tansho Hisanori
Application Number:
JP2012271688A
Publication Date:
June 28, 2017
Filing Date:
December 12, 2012
Export Citation:
Assignee:
Fujimi Incorporated Co., Ltd.
International Classes:
H01L21/304; B24B37/00; C09K3/14
Domestic Patent References:
| JP2002114967A | ||||
| JP2010135792A | ||||
| JP2011515023A |
Foreign References:
| WO2012102144A1 |
Attorney, Agent or Firm:
Makoto Abe
Michiko Oi
Seiji Tani
Michiko Oi
Seiji Tani