Title:
Electron beam device and control device and control method for electron beam device
Document Type and Number:
Japanese Patent JP6344078
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an electron beam device and a control device and a method for the electron beam device that can prevent charge-up at the side wall of a vacuum chamber.SOLUTION: An electron beam control device 115 for an electron beam device 120 having an electron gun 11 and an aperture plate 18 disposed in a vacuum chamber 16 controls the amount of convergent current to be supplied to a convergence lens 12 in order to control an electron beam 110 which is emitted from the electron gun 11 and passes through an aperture provided to the aperture plate 18. The electron beam control device 115 has an acceleration voltage change detector 113 for detecting that an acceleration voltage to be applied to the electron gun 11 is changed, and a minimum convergent current value setting unit 112 for setting a predetermined minimum value to the amount of the convergent current when the change is detected.
Inventors:
Takehiro Ishikawa
Application Number:
JP2014125928A
Publication Date:
June 20, 2018
Filing Date:
June 19, 2014
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
H01J37/24; H01J37/248; H01J37/252; H01J37/28
Domestic Patent References:
| JP63276856A | ||||
| JP2207441A | ||||
| JP6333525A | ||||
| JP59108250A |
Attorney, Agent or Firm:
Kyoto International Patent Office
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