Title:
VACUUM VALVE, VALVE SYSTEM, AND CONTROLLER AND CALIBRATOR FOR VALVE SYSTEM
Document Type and Number:
Japanese Patent JP2020024638
Kind Code:
A
Abstract:
To provide a controller capable of improving pressure regulation response in a valve system including a plurality of vacuum valves.SOLUTION: A valve system controller includes a pressure regulating controller 121 for outputting the same pressure regulating opening degree signal θs to the plurality of vacuum valves on the basis of a pumping speed per unit and volume per unit obtained by dividing a pumping speed Se of an overall valve system comprising a plurality of vacuum pumps 2 and a plurality of vacuum valves and a volume V0 of a chamber 3 by the number n of vacuum valves, a pressure Pg of the chamber 3, and a target pressure value Ps of the chamber 3.SELECTED DRAWING: Figure 3
Inventors:
NAKAMURA MASAYA
OZAKI JUNICHIRO
OZAKI JUNICHIRO
Application Number:
JP2018149760A
Publication Date:
February 13, 2020
Filing Date:
August 08, 2018
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G05D16/20; F16K37/00; F16K51/02
Domestic Patent References:
| JP2011248916A | 2011-12-08 | |||
| JP2018112932A | 2018-07-19 | |||
| JP2009532763A | 2009-09-10 | |||
| JP2011134164A | 2011-07-07 | |||
| JP2002520847A | 2002-07-09 |
Attorney, Agent or Firm:
Fuyuki Nagai
Morimoto Takuyuki
Morimoto Takuyuki