Title:
FLOW RATE ADJUSTMENT DEVICE AND CONTROL METHOD OF FLOW RATE ADJUSTMENT DEVICE
Document Type and Number:
Japanese Patent JP2020060301
Kind Code:
A
Abstract:
To suppress the generation of particles, and to accurately adjust a flow rate of fluid.SOLUTION: A flow rate adjustment device comprises: a valve body part having a flat valve body face 11a; a valve seat part 21 having a flat valve seat face 21a formed around a flow-in opening 22a, and arranged in a position opposing the valve body face 11a; an adjustment mechanism for moving the valve body part along an axial line X, and adjusting a distance between the valve body face 11a and the valve seat face 21a; and a control part for controlling the adjustment mechanism. The adjustment mechanism has a stepping motor for rotating a drive shaft around the axial line X, and a moving member moving along the axial line X according to the rotation of the drive shaft, and connected to the valve body part. The control part controls the stepping motor by an excitation signal which is changed at a microstep unit obtained by dividing one step by a prescribed division number so that the valve body part moves within a moving range St1 in which the valve body face 11a and the valve seat face 21a maintain non-contact states.SELECTED DRAWING: Figure 6
Inventors:
IGARASHI HIRONORI
IMAI YUKINOBU
KANAZAWA DAISUKE
IMAI YUKINOBU
KANAZAWA DAISUKE
Application Number:
JP2020007479A
Publication Date:
April 16, 2020
Filing Date:
January 21, 2020
Export Citation:
Assignee:
SURPASS KOGYO KK
International Classes:
F16K31/04; H02P8/22
Attorney, Agent or Firm:
Noriharu Fujita
Miori Takao
Kawakami Miki
Daisuke Nagata
Miori Takao
Kawakami Miki
Daisuke Nagata